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TAP TIMES -33- FEBRUARY 2022
Fire at ASML Berlin may
affect production —TrendForce
BERLIN, Germany — A fire occurred
at ASML’s factory here on January 3,
according to TrendForce’s investiga-
tions. ASML is the largest supplier of
key equipment (including EUV and
DUV) required for foundry and memo-
ry production.
According to TrendForce’s preliminary in-
quiry, approximately 200m2 out of a fac- ASML DUV engineers examine assembly progress of DUV
tory floor covering 32,000m2 were affected module. (ASML)
by the fire. used in advanced manufacturing processes
smaller than the 7nm node.
Acquisition of Berliner Glas Group
ASML acquired its former German supplier Current users are Samsung and TSMC
from the Berliner Glas Group for an un- Currently, the only companies in the world
disclosed amount in 2020. At the time its using this equipment for manufacturing are
sales were €230 million ($261 million). TSMC and Samsung including TSMC’s 7nm,
5nm, 3nm nodes, Samsung’s EUV Line
This factory primarily manufactures optical (7nm, 5nm and 4nm) built in Hwaseong,
components used in lithography systems South Korea, and 3nm GAA node.
such as wafer tables, reticle chucks, and
mirror blocks. Reticle chucks used for af- However, due to factors such as the short-
fixing photomasks are in short supply. age of global foundry production capacity
and the active expansion of manufacturing,
EUV components semiconductor equipment lead times are
Currently, the majority of components also stretching further into the future.
produced at this factory go towards sup-
plying EUV machines while the lion’s share Micron to debut EUV in 2024
of demand for these products come from Samsung and SK Hynix are already using
foundries. EUV in their 1Znm and 1alpha nm process-
es for DRAM, while U.S. manufacturer Mi-
If the fire delays component delivery, it cron is expected to introduce EUV to their
cannot be ruled out that ASML will priori- 1gamma nm process in 2024.
tize the allocation of output towards fulfill-
ing foundry orders. According to TrendForce’s current informa-
tion, the lead time on ASML EUV equipment
Lead time for this exclusive supply of key is approximately 12 to 18 months.
EUV machines has been long and may af-
fect the timeframe of advanced manufac- Due to this long equipment lead time, ASML
turing process transition is at liberty to wait for the completion of re-
placement components for those lost in the
In terms of foundries, EUV is primarily next page
